Specimen Preparation of Rock Forming Minerals by Using Ion Beam for TEM Observation.
نویسندگان
چکیده
منابع مشابه
Improved focused ion beam target preparation of (S)TEM specimen--a method for obtaining ultrathin lamellae.
Specimen quality is vital to (scanning) transmission electron microscopy (TEM) investigations. In particular, thin specimens are required to obtain excellent high-resolution TEM images. Conventional focused ion beam (FIB) preparation methods cannot be employed to reliably create high quality specimens much thinner than 20 nm. We have developed a method for in situ target preparation of ultrathi...
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The recent development of Dual-BeamTM or Cross-BeamTM FIB systems has gradually taken over the traditional single beam FIB systems. A typical FIB column contains a liquid metal ion source that produces a finely focused Ga ion beam. The primary Ga ion beam is accelerated by 30-50 kV, and directed towards the features of interest on the specimen. The incident ion beam will sputter atoms from the ...
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ژورنال
عنوان ژورنال: Journal of the Mineralogical Society of Japan
سال: 1999
ISSN: 1883-7018,0454-1146
DOI: 10.2465/gkk1952.28.23